Process kit for a substrate support
AssigneeApplied Materials, Inc.
InventorsMuhannad Mustafa, Muhammad M. Rasheed, Yu Lei, Avgerinos V. Gelatos, Vikash Banthia, Victor H. Calderon, Shi Wei Toh, Yung-Hsin Lee, Anindita Sen
Life of this patent
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Abstract
Methods and apparatus for processing substrates are provided herein. In some embodiments, a process kit for a substrate support includes: an upper edge ring made of quartz and having an upper surface and a lower surface, wherein the upper surface is substantially planar and the lower surface includes a stepped lower surface to define a radially outermost portion and a radially innermost portion of the upper edge ring.
Claims19
A process kit for a substrate support, comprising:
- an upper edge ring made of quartz and having an upper surface and a lower surface, wherein the upper surface is substantially planar and the lower surface includes a stepped lower surface having a first step that defines a radially outermost portion of the upper edge ring and having a second step that defines a radially innermost portion of the upper edge ring, the upper edge ring having a central portion extending between and spacing the radially outermost portion and the radially innermost portion, and wherein an inner surface of the upper edge ring extends at a constant diameter from the upper surface to the lower surface;
- and
- a lower edge ring, wherein the lower edge ring is radially spaced from the first step of the stepped lower surface and the lower edge ring is configured to interface with the second step of the stepped lower surface of the upper edge ring.
A process kit for a substrate support, comprising:
- a lower edge ring, wherein the lower edge ring is electrically conductive, and has a rectangular cross-sectional shape with an upper and outer peripheral notch;
- and
- an upper edge ring having a contoured lower surface configured to interface with the lower edge ring, the upper edge ring further having an inner diameter that is less than an inner diameter of the lower edge ring and an outer diameter that is greater than an outer diameter of the lower edge ring, the upper edge ring further having an upper surface that is substantially planar, wherein the upper edge ring is fabricated from quartz, and wherein the contoured lower surface of the upper edge ring includes a stepped lower surface that generally reduces a thickness of the upper edge ring from a radially outermost portion to a radially innermost portion.
Dependencies are inferred from the claim text.