Ceramic material and electrostatic chuck device
AssigneeSumitomo Osaka Cement Co., Ltd.
InventorsYoshiki Yoshioka, Nobuhiro Hidaka, Hironori Kugimoto
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Abstract
Provided is a composite sintered body for an electrostatic chuck, which is not easily broken even if it is exposed to high-power plasma. Further, provided are an electrostatic chuck device using such a composite sintered body for an electrostatic chuck and a method of manufacturing a composite sintered body for an electrostatic chuck. The composite sintered body for an electrostatic chuck is a composite sintered body including an insulating ceramic and silicon carbide, in which crystal grains of the silicon carbide are dispersed in at least one selected from the group consisting of a crystal grain boundary and a crystal grain of a main phase formed by sintering crystal grains of the insulating ceramic.
Claims7
A ceramic material that is a composite sintered body including an insulating ceramic and silicon carbide,
- wherein crystal grains of the silicon carbide are dispersed in at least one selected from the group consisting of a crystal grain boundary and a crystal grain of a main phase formed by sintering crystal grains of the insulating ceramic,
- a content of crystal grains having a β-SiC type crystal structure is more than 60% by volume with respect to a total amount of the crystal grains of the silicon carbide,
- the ceramic material includes a portion in which the crystal grains having the β-SiC type crystal structure are sintered with each other,
- in the silicon carbide particles in the composite-sintered body, fine silicon carbide particles having a particle diameter of 0.04 μm or less are included in an amount of 0.001% by volume or more with respect to the entire composite sintered body,
- the composite sintered body includes pores which are present in a crystal grain boundary, and
- a ratio of an apparent density of the composite sintered body with respect to a hypothetical true density when the composite sintered body is assumed not to include the pores is 97% or more.
A ceramic material which is a composite sintered body of aluminum oxide and silicon carbide,
- wherein crystal grains of the silicon carbide are dispersed in a crystal grain boundary and a crystal grain of a main phase formed by sintering crystal grains of the aluminum oxide, and
- in an X-ray diffraction pattern obtained by irradiating a surface of the composite sintered body with CuK α rays, a ratio (I1/I3) of a peak (I1) which is observed around 2θ=33.7 degrees and a peak (I3) which is observed around 2θ=35.8 degrees is 0.05 or less,
- the ceramic material includes a portion in which the crystal grains having the β-SiC type crystal structure are sintered with each other,
- in the silicon carbide particles in the composite-sintered body, fine silicon carbide particles having a particle diameter of 0.04 μm or less are included in an amount of 0.001% by volume or more with respect to the entire composite sintered body, and
- in the X-ray diffraction pattern, a ratio (I2/I3) of a peak (I2) which is observed around 2θ=34.1 degrees and the peak (I3) which is observed around 2θ=35.8 degrees is 0.01 or less.
Dependencies are inferred from the claim text.