Substrate warehouse, substrate processing system, and substrate inspection method

A substrate warehouse configured to store a container housing a substrate, comprising:

• a transfer-in part configured to allow the container to be mounted thereon when the container is transferred-in from an outside;
• a transfer-out part configured to allow the container to be mounted thereon when the container is transferred-out to the outside;
• a standby part configured to allow the container standing by for transfer-out to the outside to be mounted thereon;
• a functional part comprising an inspection part, the inspection part being configured to perform processing of inspecting the substrate;
• a delivery part configured to allow the container to be mounted thereon when delivering the substrate between the functional part and the container;
• a container transfer mechanism configured to transfer the container in the substrate warehouse;
• and
• a substrate transfer mechanism configured to transfer the substrate between the functional part and the container mounted on the delivery part, wherein
• the functional part comprises at least one of an inverter configured to perform processing of inverting front and rear surfaces of the substrate, a front surface cleaner configured to perform processing of cleaning the front surface of the substrate, a rear surface cleaner configured to perform processing of cleaning the rear surface of the substrate, a peripheral edge cleaner configured to clean a peripheral edge portion of the substrate, and a peripheral edge polisher configured to polish the peripheral edge portion of the substrate.