Chamber structure
AssigneeHirata Corporation
InventorYusuke Senoue
Life of this patent
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Abstract
There is provided a chamber structure which greatly facilitates maintenance, such as installation and removal of a transfer robot. In this chamber structure, a transfer robot is attached, via a robot base member, to an opening provided in a base portion of a transfer compartment of a transfer chamber. A robot base member is provided below the opening, and the transfer robot includes a base unit and an arm unit provided on an upper part of the base unit. A robot flange member with the same shape as an opening hole in the robot base member is provided above the base unit. The arm unit is freely insertable through the opening hole, and the robot flange member is detachably connected to a peripheral portion of the opening hole.
Claims7
A chamber structure in which a transfer robot is attached, via a robot base portion and a robot flange portion, to an opening provided in a base portion of a transfer compartment, which is an internal space of a transfer chamber,
- wherein the robot base portion is provided below the opening in the transfer chamber,
- the transfer robot includes a base unit and an arm unit provided on an upper portion of the base unit,
- the robot flange portion, which has a same shape as an opening hole of the robot base portion, is provided on an upper side of the base unit,
- the arm unit is freely insertable through the opening hole, and
- the robot flange portion is detachably connected to a peripheral portion of the opening hole.
Dependencies are inferred from the claim text.