Substrate treating apparatus and substrate transfer apparatus
AssigneeSemes Co., Ltd.
InventorsOhyeol Kwon, Jung Hwan Lee, Soo Young Park
Life of this patent
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Abstract
A substrate treating apparatus includes a plurality of load ports on which carriers having substrates received therein are placed, a plurality of process chambers that perform processes on the substrates, and a transfer robot that transfers the substrates between the load ports and the process chambers. The transfer robot is movable along a transfer passage having a lengthwise direction formed along a first direction, the load ports and the process chambers are arranged along the first direction on one side and an opposite side of the transfer passage, and the transfer robot transfers the substrates between the carriers placed on the load ports and the process chambers.
Claims20
A substrate treating apparatus comprising:
- a plurality of load ports configured to support substrate carriers;
- a plurality of process chambers configured to perform processes on substrates included in the substrate carriers;
- and
- a single transfer robot that is configured to transfer the substrates between the load ports and the process chambers,
- wherein the single transfer robot is configured to move along a transfer passage, the transfer passage having a lengthwise direction extending along a first direction,
- some of the load ports and the process chambers are arranged along the first direction on one side of the transfer passage and others of the load ports and the process chambers are arranged along an opposite side of the transfer passage,
- the single transfer robot is configured to transfer the substrates between the substrate carriers on the load ports to and from the process chambers,
- one of the load ports on the one side of the transfer passage is configured to support a first carrier having a first door, and
- one of the load ports on the other side of the transfer passage is configured to support a second carrier having a second door that faces the first door.
A transfer robot for transferring substrates between carriers placed on load ports and process chambers, the transfer robot comprising:
- a first hand;
- and
- a second hand at a different height from the first hand,
- wherein the first hand is configured to transfer the substrates into or out of one of a first process chamber and a second process chamber, the first chamber and the second chamber opposite to each other with respect to a transfer passage, and
- the second hand is configured to transfer the substrates into or out of the other process chamber at the same time as the first hand, and
- a height difference between the first hand and the second hand corresponds to a height difference between a substrate entrance/exit opening of the first process chamber and a substrate entrance/exit opening of the second process chamber.
A substrate treating apparatus comprising:
- an index module including one or more load ports;
- a process module including one or more process chambers configured to receive substrates from the index module and to perform processes on the substrates;
- and
- a single transfer robot that is configured to transfer the substrates between the index module and the process module,
- wherein the single transfer robot is movable along a transfer passage having a lengthwise direction extending along a first direction,
- some of the load ports and the process chambers are arranged along the first direction on one side of the transfer passage and others of the load ports and the process chambers are arranged along an opposite side of the transfer passage,
- the single transfer robot is configured to transfer the substrates between carriers on the load ports to and from the process chambers,
- one of the load ports on the one side of the transfer passage is configured to support a first carrier having a first door, and
- one of the load ports on the other side of the transfer passage is configured to support a second carrier having a second door that faces the first door.
Dependencies are inferred from the claim text.