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US 11,387,125 B2Granted
Equipment front end module
AssigneePico & Tera Co., Ltd.
InventorBum Je Woo
Life of this patent
Estimating the term…
Abstract
Proposed is an EFEM configured to perform wafer transfer between a wafer storage device and process equipment. More particularly, proposed is an EFEM that prevents harmful gases inside a transfer chamber in which wafer transfer is performed from escaping out of the EFEM.
Claims9
An equipment front end module (EFEM), comprising:
- a transfer chamber in which wafers are transferred between a wafer storage device and process equipment;
- a first chamber surrounding the transfer chamber at a position outside the transfer chamber;
- a transfer chamber supply part supplying gas to the transfer chamber;
- a transfer chamber exhaust part exhausting gas inside the transfer chamber;
- a first chamber exhaust part exhausting gas inside the first chamber;
- and
- a controller controlling an operation of one or more of the transfer chamber supply part, the transfer chamber exhaust part, and the first chamber exhaust part so that a pressure inside the first chamber is maintained lower than that inside the transfer chamber.
4 more elements
Dependencies are inferred from the claim text.