Metrology method in wafer transportation

A method for processing a wafer, comprising:

• moving a wafer carrier containing a wafer from a first processing tool to a second processing tool and monitoring an environmental condition within the wafer carrier, wherein the movement of the wafer carrier containing the wafer from the first processing tool to the second processing tool is executed multiple times;
• collecting data associated with the environmental condition in a previous movement of the wafer carrier;
• and
• stopping the movement of the wafer carrier from the first processing tool to the second processing tool and transferring the wafer carrier to a rework station for performing a rework process to the wafer, when the environmental condition monitored by a metrology tool is outside a range of acceptable values, wherein the range of acceptable values is derived from the data collected in the previous movement of the wafer carrier.

A fabrication facility, comprising:

• a wafer carrier configured to receive at least one wafer;
• a processing tool having a load port configured to dock the wafer carrier;
• a stocker configured for storage of the wafer carrier;
• a transportation apparatus configured to move the wafer carrier to the load port of the processing tool and to move the wafer carrier between the load port of the processing tool and a load port of the stocker, wherein the transportation apparatus includes a trail assembly and an overhead hoist transport assembly movably suspend on the trail assembly;
• a metrology tool positioned on the wafer carrier, wherein the metrology tool includes at least one sensor configured to:
• measure a leveling degree of the load port of the processing tool when the wafer carrier is placed on the load port of the processing tool;
• and
• measure a leveling degree of the load port of the stocker when the wafer carrier is placed on the load port of the stocker;
• and
• an interface device positioned in the transportation apparatus, wherein the interface device includes a power circuit configured to supply power to the metrology tool.