Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber
AssigneeASM IP Holding B.V.
InventorVarun Sharma
Life of this patent
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Abstract
A chemical dispensing apparatus for providing a chlorine vapor to a reaction chamber is disclosed. The chemical dispensing apparatus may include: a chemical storage vessel configured for storing a chlorine-containing chemical species, a reservoir vessel in fluid communication with the chemical storage vessel, the reservoir vessel configured for converting the chlorine-containing chemical species to the chlorine vapor, and a reaction chamber in fluid communication with the reservoir vessel. Methods for dispensing a chlorine vapor to a reaction chamber are also disclosed.
Claims23
A chemical dispensing apparatus for providing a chlorine vapor to a reaction chamber comprising:
- a chemical storage vessel configured for storing a chlorine-containing chemical species as a liquid or solid;
- a reservoir vessel in fluid communication with the chemical storage vessel, the reservoir vessel configured for converting the chlorine-containing chemical species to the chlorine vapor and a decomposition product, wherein a chemical composition of the chlorine-containing chemical species differs from a chemical composition of the chlorine vapor;
- a reaction chamber for semiconductor device fabrication in fluid communication with the reservoir vessel;
- and
- a vapor passageway between the chemical storage vessel and the reaction chamber,
- wherein the chlorine vapor from the reservoir vessel is introduced into the reaction chamber.
A method for dispensing a chlorine vapor to a reaction chamber comprising:
- providing a chemical storage vessel, the chemical storage vessel containing a chlorine-containing chemical species as a liquid or solid;
- flowing the chlorine-containing chemical species from the chemical storage vessel to a reservoir vessel;
- converting the chlorine-containing chemical species into a chlorine vapor and a decomposition product, wherein a chemical composition of the chlorine-containing chemical species differs from a chemical composition of the chlorine vapor inside the reservoir vessel;
- controllably flowing the chlorine vapor into the reaction chamber;
- and
- performing one or more of an etching process and a cleaning process using the chlorine vapor.
Dependencies are inferred from the claim text.