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US 11,387,099 B2Granted
Spin coating process and apparatus with ultrasonic viscosity control
AssigneeSanDisk Technologies LLC
InventorYutaka Ishiguro
Life of this patent
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Abstract
A spin coating method includes dispensing a coating material including a nonvolatile film material and a volatile solvent over a substrate, and spin coating the coating material over the substrate by spinning the substrate while applying ultrasound waves to the coating material to reduce a viscosity of the coating material during the spin coating.
Claims13
A spin coating method, comprising:
- dispensing a coating material including a nonvolatile film material and a volatile solvent over a substrate;
- spin coating the coating material over the substrate by spinning the substrate while applying ultrasound waves to the coating material to reduce a viscosity of the coating material during the spin coating;
- applying an additional coating material over a layer of the coating material on the substrate after the ultrasound waves are turned off;
- and
- spin coating the additional coating material over the layer of the coating material without applying ultrasound waves to the additional coating material.
2 more elements
Dependencies are inferred from the claim text.