Uniform pumping dual-station vacuum processor

A dual-station vacuum processor comprising:

• two vacuum processing chambers, wherein the two vacuum processing chambers share a common sidewall and communicate with an offset-pumping port positioned below the common sidewall, wherein:
• in the dual-station vacuum processor, a damper is provided in an adjustment region in each vacuum processing chamber;
• a vertically extending baffle plate is provided on a bottom plate of each vacuum processing chamber and arranged to surround a center axis of each vacuum processing chamber;
• each of the two vacuum processing chambers comprises a base for disposing a substrate, the base is mounted on a sealing plate set to the top portion of the baffle plate, thereby defining a chamber jointly enclosed by the sealing plate and the baffle plate, wherein the bottom portion of the chamber has a first atmospheric environment channel in communication with an atmosphere environment, and the top portion of the sealing plate and an outer sidewall of the baffle plate are in fluidic communication with the offset pumping port;
• the damper of each vacuum processing chamber comprises a rib that extends transversely from the outer sidewall of the baffle plate towards the common sidewall between the two vacuum processing chambers, a tail end of the rib being connected at the common sidewall to the tail end of the opposing rib of opposing vacuum processing chamber of the dual-station vacuum processor, and wherein a downward projection of the rib blocks part of the offset-pumping port;
• and
• a first channel is provided in the rib of each vacuum processing chamber in fluidic communication with the first atmospheric environment channel, the first channel extending through to the first channel in the opposing rib, the first channel fluidly communicating with a second channel provided in the common sidewall and communicating with the atmospheric environment outside of the vacuum processing chamber via an atmospheric port provided in the second channel, the first channel of each rib, the second channel and the port form together a second atmospheric environment channel.