Training data creation method and device, and defect inspection method and device

Abstract

Provided are a training data creation method and device, and a defect inspection method and device capable of securing the accuracy of defect inspection even though the number of samples of a defect to be used in creating training data is small. The training data creation method includes acquiring a training-use image including a received light image created based on reflected light or transmitted light from an inspection object having a defect obtained by irradiating the inspection object with light rays or radiation, executing frequency distribution analysis on the training-use image, receiving an input of a parameter for designating a frequency bandwidth, selecting a frequency bandwidth signal from an analysis result of the frequency distribution analysis according to the frequency bandwidth designated by the parameter, acquiring defect information indicating a defect for an image corresponding to the frequency bandwidth signal, and creating training data to be used in learning of a defect inspection device, which inspects a defect of the inspection object, based on the defect information.

Dependencies are inferred from the claim text.