Scheduling substrate routing and processing

A non-transitory machine-readable storage medium storing instructions which, when executed cause a processing device to:

• identify a bottleneck operation of a plurality of operations in a sequence recipe, wherein the plurality of operations are associated with transporting and processing a plurality of substrates in a substrate processing system;
• determine, based on the bottleneck operation, a takt time for the plurality of substrates, wherein the takt time is an amount of time between a first substrate entering the substrate processing system and a second substrate entering the substrate processing system;
• determine a plurality of queue times, wherein each of the plurality of queue times corresponds to a respective operation of the plurality of operations;
• generate a schedule based on the takt time and the plurality of queue times;
• and
• transmit the schedule to a controller of the substrate processing system, wherein the controller is to control the substrate processing system to process the plurality of substrates based on the schedule.

A system comprising:

• memory;
• and
• a processing device coupled to the memory, the processing device to:
• identify a bottleneck operation of a plurality of operations in a sequence recipe, wherein the plurality of operations are associated with transporting and processing a plurality of substrates in a substrate processing system;
• determine, based on the bottleneck operation, a takt time for the plurality of substrates, wherein the takt time is an amount of time between a first substrate entering the substrate processing system and a second substrate entering the substrate processing system;
• determine a plurality of queue times, wherein each of the plurality of queue times corresponds to a respective operation of the plurality of operations;
• cause, based on the takt time and the plurality of queue times, the plurality of substrates to be processed by the substrate processing system;
• generate a schedule based on the takt time and the plurality of queue times;
• and
• transmit the schedule to a controller of the substrate processing system, wherein the controller is to control the substrate processing system to process the plurality of substrates based on the schedule.