Method and system for scheduling semiconductor fabrication

A semiconductor fabrication scheduling system, comprising:

• a plurality of workstations;
• a server;
• and
• a dispatcher controlled by the server and dispatching product lots to be fabricated to the plurality of workstations,
• wherein the server is configured to perform:
• creating a load scheduling data schema including facility data of the product lots;
• generating a load schedule profile using a load-balancing model and based on the load scheduling data schema, wherein the load-balancing model includes one or more objective functions and there is at least one weight factor in an objective function;
• generating a current load schedule based on the load schedule profile;
• controlling the dispatcher to dispatch the product lots to the plurality of workstations using the current load schedule to complete fabrication of the product lots;
• and
• after the product lots are dispatched and the fabrication of the product lots is further completed:
• obtaining a set of current key performance indicators (KPIs) of the completed fabrication of the product lots;
• using a big-data architecture to automatically adjust the weight factors of the objective functions of the load-balancing model based on the current KPIs;
• and
• using the adjusted weight factors to generate a next load schedule for next cycle of fabrication.

A non-transitory computer-readable storage medium containing computer-executable instructions for, when executed by one or more processors, performing a semiconductor fabrication scheduling method comprising:

• creating a load scheduling data schema including facility data of product lots to be dispatched to a plurality of workstations;
• generating a load schedule profile using a load-balancing model and based on the load scheduling data schema, wherein the load-balancing model includes one or more objective functions and there is at least one weight factor in an objective function;
• generating a current load schedule based on the load schedule profile;
• controlling a dispatcher to dispatch the product lots to the plurality of workstations using the current load schedule to complete fabrication of the product lots;
• and
• after the product lots are dispatched and the fabrication of the product lots is further completed:
• obtaining a set of current key performance indicators (KPIs) of the completed fabrication of the product lots;
• using a big-data architecture to automatically adjust the weight factors of the objective functions of the load-balancing model based on the current KPIs;
• and
• using the adjusted weight factors to generate a next load schedule for next cycle of fabrication.