Encoder apparatus, drive apparatus, stage apparatus, and robot apparatus with light emission adjuster
AssigneeNikon Corporation
InventorMasahiko Goto
Life of this patent
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Abstract
Provided is an encoder apparatus that is free from battery maintenance or has low frequency of battery maintenance. The encoder apparatus includes: a position detection system including: a scale; a light emitter that irradiates the scale with light; a light detector that changes a relative position thereof with the scale in response to movement of a mover; and a detector that detects position information on the mover based on a detection result of the light detector. The encoder apparatus also includes an electric signal generator that generates an electric signal in response to the movement of the mover; and a light emission adjuster that adjusts emission of light from the light emitter based on the electric signal.
Claims18
An encoder apparatus, comprising:
- a scale;
- a position detection system including
- a light emitter that irradiates the scale with light;
- a light receiving sensor that detects the light from the scale;
- and
- a detect circuit that detects position information on a mover based on a detection result of the light receiving sensor;
- an electric signal generator that generates an electric signal in response to movement of the mover;
- a light emission adjuster that controls the light emitter and the light receiving sensor;
- a battery;
- and
- a regulator that adjusts power supplied from the battery to the light emission adjuster based on the electric signal, wherein
- the scale includes a first scale and a second scale positioned circumferentially inward of the first scale, and
- the light emitter irradiates both the first scale and the second scale in response to power being supplied from the battery to the light emission adjuster.
Dependencies are inferred from the claim text.