Grinding apparatus
AssigneeDisco Corporation
InventorsKenji Takenouchi, Takayuki Gawazawa
Life of this patent
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Abstract
A grinding apparatus includes a table that holds a workpiece, and a grinding unit including a grinding wheel mounted to a spindle. The grinding wheel has a grindstone formed by binding abrasive grains with a bonding agent. In addition, the grinding apparatus further includes: a supply unit that supplies grinding water to at least the grindstone when grinding the workpiece; and a light applying unit that is disposed adjacent to the table and that applies light to a grinding surface of the grindstone grinding the workpiece held by the table. The light applying unit includes a light emission section that emits light, and a diffusion preventive wall that surrounds the light emission section and prevents diffusion of the light.
Claims10
A grinding apparatus comprising:
- a holding table that holds a workpiece;
- and
- a grinding unit including a spindle and a grinding wheel that is mounted to the spindle and that grinds the workpiece held by the holding table,
- wherein the grinding wheel has a grindstone formed by binding abrasive grains with a bonding agent, and
- the grinding apparatus further comprises:
- a grinding water supply unit that supplies grinding water to at least the grindstone when the workpiece held by the holding table is ground by the grinding unit;
- and
- a light applying unit that is disposed adjacent to the holding table and that applies light to a grinding surface of the grindstone grinding the workpiece held by the holding table, and
- the light applying unit includes a light emission section that emits light, a diffusion preventive wall that surrounds the light emission section and that prevents diffusion of the light and a cleaning water supply section for supplying cleaning water to remove dirt in the light applying unit.
Dependencies are inferred from the claim text.