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US 11,383,211 B2Granted
Point-of-use dynamic concentration delivery system with high flow and high uniformity
AssigneeTokyo Electron Limited
InventorsRonald W. Nasman, Lior Huli, Anton deVilliers, Rodney Robison, Norman Jacobson, James Grootegoed
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Abstract
A method and a system are described for mixing liquid chemicals at dynamically changing or static ratios during a given dispense, with extremely high uniformity and repeatability. A mixer includes multiple fluid supply lines including elongate bladders defining a linear flow path and being configured to laterally expand to collect a process fluid and laterally contract to deliver a selected volume of the process fluid to the mixer.
Claims20
An apparatus for dispensing fluid, the apparatus comprising:
- a mixer configured to receive at least two fluids for mixing, the mixer being a microfluidic mixer configured to combine at least two fluids using slot-shaped fluid conduits;
- a nozzle positioned proximate to the mixer to receive mixed fluids for dispense;
- a first fluid supply line connected to the mixer and configured to controllably supply a first process fluid into the mixer, the first fluid supply line including an elongate bladder defining a linear fluid flow path and being configured to laterally expand and collect a charge of the first process fluid, and laterally contract to deliver a selected volume of the first process fluid to the mixer;
- a second fluid supply line connected to the mixer and configured to controllably supply a second process fluid into the mixer to deliver a selected volume of the second process fluid to the mixer;
- and
- a controller configured to dynamically control delivery of the first process fluid and the second process fluid independent of each other.
3 more elements
A method for dispensing fluid, the method comprising:
- mixing a first process fluid with a second process fluid proximate a dispense nozzle using a mixer that is a microfluidic mixer, the microfluidic mixer configured to combine at least two fluids using slot-shaped fluid conduits;
- supplying a first process fluid to the mixer using a first fluid supply line configured to control volume of the first process fluid into the mixer using an elongate bladder defining a linear fluid flow path, the elongate bladder being configured to laterally expand and collect a charge of the first process fluid, and laterally contract to deliver a selected volume of the first process fluid to the mixer;
- supplying a second process fluid to the mixer using a second fluid supply line configured to control volume of the second process fluid delivered to the mixer;
- and
- dispensing mixed process fluid onto a substrate via the dispense nozzle, wherein the mixer mixes the first process fluid with the second process fluid proximate the dispense nozzle such that a volume of mixed process fluid between the mixer and an outlet of the dispense nozzle is less than 0.1 ml.
2 more elements
Dependencies are inferred from the claim text.