Stage driving apparatus, lithography apparatus, and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorTakayasu Matsui
Life of this patent
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Abstract
The present invention provides a stage driving apparatus for driving a stage, comprising: a linear motor including a stator which includes a coil array obtained by alternately arraying first phase coils and second phase coils, and a movable element placed on the stage; and a control unit configured to control the linear motor by controlling an energization state of the coil array, wherein in a stopping period during which the stage is stopped in a predetermined position, the control unit holds a position of the stage in the predetermined position by turning on the first phase coil among the coil array, and generates heat by turning on the second phase coil arranged in a position where no thrust is given to the movable element among the coil array.
Claims12
A stage driving apparatus for driving a stage, comprising:
- a linear motor including a stator which includes a coil array obtained by alternately arraying first phase coils and second phase coils, and a movable element placed on the stage;
- and
- a control unit configured to control the linear motor by controlling an energization state of the coil array,
- wherein in a stopping period during which the stage is stopped in a predetermined position, the control unit holds a position of the stage in the predetermined position by turning on the first phase coil among the coil array, and generates heat by turning on the second phase coil arranged in a position where no thrust is given to the movable element among the coil array.
A lithography apparatus for forming a pattern on a substrate, comprising:
- a stage configured to hold the substrate;
- and
- a stage driving apparatus configured to drive the stage,
- wherein the stage driving apparatus includes:
- a linear motor including a stator which includes a coil array obtained by alternately arraying first phase coils and second phase coils, and a movable element placed on the stage;
- and
- a control unit configured to control the linear motor by controlling an energization state of the coil array, and
- wherein in a stopping period during which the stage is stopped in a predetermined position, the control unit holds a position of the stage in the predetermined position by turning on the first phase coil among the coil array, and generates heat by turning on the second phase coil arranged in a position where no thrust is given to the movable element among the coil array.
A method of manufacturing an article, the method comprising:
- forming a pattern on a substrate using a lithography apparatus;
- processing the substrate, on which the pattern has been formed, to manufacture the article,
- wherein the lithography apparatus includes:
- a stage configured to hold the substrate;
- and
- a stage driving apparatus configured to drive the stage,
- wherein the stage driving apparatus includes:
- a linear motor including a stator which includes a coil array obtained by alternately arraying first phase coils and second phase coils, and a movable element placed on the stage;
- and
- a control unit configured to control the linear motor by controlling an energization state of the coil array, and
- wherein in a stopping period during which the stage is stopped in a predetermined position, the control unit holds a position of the stage in the predetermined position by turning on the first phase coil among the coil array, and generates heat by turning on the second phase coil arranged in a position where no thrust is given to the movable element among the coil array.
Dependencies are inferred from the claim text.