Light emitting diode (LED) mass-transfer apparatus and method of manufacture

An apparatus for transferring a plurality of light-emitting device structures disposed on a source substrate to a target substrate, the apparatus comprising:

• a laser source capable of emitting pulses of light sufficient to disunite a portion of the plurality of light-emitting device structures from the source substrate through a beam addressable release process;
• a multi-beam scan head onto which the source substrate can be releasably mounted, the multi-beam scan head including a spatial light modulator device to receive an incident laser area beam, form a spatially modulated area light beam and direct the spatially modulated area light beam within a scan area located on at least a portion of the source substrate mounted onto the multi-beam scan head;
• a vertical motion and control device to position at least a portion of the source substrate held by the multi-beam scan head, and containing the plurality of light-emitting device structures, in close proximity to at least a portion of the target substrate with an intervening interface region;
• a support and motion system capable of enacting relative movement between the multi-beam scan head holding the source substrate and the target substrate;
• a computer device capable of reading and updating a Known Good Die (KGD) computer file that contains information about the plurality of light-emitting device structures disposed on the source substrate and can control the multi-beam scan head and target substrate relative motion, and control laser source;
• wherein the beam addressable release process causes the portion of the plurality of light-emitting device structures to be released onto predetermined locations on the target substrate.