Compound capacitor structures

A semiconductor device, comprising:

• a first plate;
• a second plate in proximity to the first plate, the first plate and the second plate forming a first plate-to-plate capacitor;
• a third plate electrically connected to the second plate, the third plate at least substantially coplanar with the first plate;
• a fourth plate electrically connected to the first plate, the fourth plate at least substantially coplanar with the second plate, the fourth plate in proximity to the third plate, the third plate and the fourth plate forming a second plate-to-plate capacitor;
• and
• a finger-to-finger capacitor in proximity to the first plate and the third plate and electrically connected in parallel to the first plate-to-plate capacitor and the second plate-to-plate capacitor, wherein individual finger elements of the finger-to-finger capacitor extend outward from transmission lines located between the first plate and the third plate.

A capacitor, comprising:

• a first capacitor terminal;
• a second capacitor terminal;
• a first plate electrically connected to the first capacitor terminal, the first plate comprising electrically conductive material;
• a second plate electrically connected to the second capacitor terminal, the second plate comprising an electrically conductive material, the second plate at least substantially parallel to the first plate and offset from the first plate in a direction at least substantially normal to the first plate;
• a third plate electrically connected to the second capacitor terminal, the third plate comprising electrically conductive material, the third plate at least substantially coplanar with the first plate and offset from the first plate in an at least substantially parallel direction from the first plate;
• a fourth plate electrically connected to the first capacitor terminal, the fourth plate comprising electrically conductive material, the fourth plate at least substantially coplanar with the second plate and offset from the second plate in a substantially parallel direction from the second plate, the fourth plate at least substantially parallel to the third plate and offset from the third plate in a direction at least substantially normal to the third plate;
• a first plurality of finger elements comprising electrically conductive material, each of the first plurality of finger elements electrically connected to the first capacitor terminal;
• and
• a second plurality of finger elements interleaved with the first plurality of finger elements to form a finger-to-finger sub-capacitor, the second plurality of finger elements comprising electrically conductive material, the second plurality of finger elements electrically connected to the second capacitor terminal;
• wherein:
• at least a portion of the second plurality of finger elements is located in proximity to the first plate to induce capacitive coupling between the first plate and the at least the portion of the second plurality of finger elements responsive to a voltage potential difference applied across the first capacitor terminal and the second capacitor terminal;
• and
• at least a portion of the first plurality of finger elements is located in proximity to the third plate to induce capacitive coupling between the third plate and the at least the portion of the first plurality of finger elements responsive to the voltage potential difference applied across the first capacitor terminal and the second capacitor terminal, wherein the at least the portion of the second plurality of finger elements that is located in proximity to the first plate is wider than a portion of the first plurality of finger elements that is located in the proximity to the first plate.

A capacitor, comprising:

• a first capacitor terminal;
• a second capacitor terminal;
• a first plate electrically connected to the first capacitor terminal, the first plate comprising electrically conductive material;
• a second plate electrically connected to the second capacitor terminal, the second plate comprising an electrically conductive material, the second plate at least substantially parallel to the first plate and offset from the first plate in a direction at least substantially normal to the first plate;
• a third plate electrically connected to the second capacitor terminal, the third plate comprising electrically conductive material, the third plate at least substantially coplanar with the first plate and offset from the first plate in an at least substantially parallel direction from the first plate;
• a fourth plate electrically connected to the first capacitor terminal, the fourth plate comprising electrically conductive material, the fourth plate at least substantially coplanar with the second plate and offset from the second plate in a substantially parallel direction from the second plate, the fourth plate at least substantially parallel to the third plate and offset from the third plate in a direction at least substantially normal to the third plate;
• a first plurality of finger elements comprising electrically conductive material, each of the first plurality of finger elements electrically connected to the first capacitor terminal;
• and
• a second plurality of finger elements interleaved with the first plurality of finger elements to form a finger-to-finger sub-capacitor, the second plurality of finger elements comprising electrically conductive material, the second plurality of finger elements electrically connected to the second capacitor terminal;
• wherein:
• at least a portion of the second plurality of finger elements is located in proximity to the first plate to induce capacitive coupling between the first plate and the at least the portion of the second plurality of finger elements responsive to a voltage potential difference applied across the first capacitor terminal and the second capacitor terminal;
• and
• at least a portion of the first plurality of finger elements is located in proximity to the third plate to induce capacitive coupling between the third plate and the at least the portion of the first plurality of finger elements responsive to the voltage potential difference applied across the first capacitor terminal and the second capacitor terminal, wherein the at least the portion of the first plurality of finger elements that is located in proximity to the third plate is wider than a portion of the second plurality of finger elements that is located in the proximity to the third plate.

A capacitor, comprising:

• a first capacitor terminal;
• a second capacitor terminal;
• a first plate electrically connected to the first capacitor terminal, the first plate comprising electrically conductive material;
• a second plate electrically connected to the second capacitor terminal, the second plate comprising an electrically conductive material, the second plate at least substantially parallel to the first plate and offset from the first plate in a direction at least substantially normal to the first plate;
• a third plate electrically connected to the second capacitor terminal, the third plate comprising electrically conductive material, the third plate at least substantially coplanar with the first plate and offset from the first plate in an at least substantially parallel direction from the first plate;
• a fourth plate electrically connected to the first capacitor terminal, the fourth plate comprising electrically conductive material, the fourth plate at least substantially coplanar with the second plate and offset from the second plate in a substantially parallel direction from the second plate, the fourth plate at least substantially parallel to the third plate and offset from the third plate in a direction at least substantially normal to the third plate;
• a first plurality of finger elements comprising electrically conductive material, each of the first plurality of finger elements electrically connected to the first capacitor terminal;
• and
• a second plurality of finger elements interleaved with the first plurality of finger elements to form a finger-to-finger sub-capacitor, the second plurality of finger elements comprising electrically conductive material, the second plurality of finger elements electrically connected to the second capacitor terminal;
• wherein:
• at least a portion of the second plurality of finger elements is located in proximity to the first plate to induce capacitive coupling between the first plate and the at least the portion of the second plurality of finger elements responsive to a voltage potential difference applied across the first capacitor terminal and the second capacitor terminal;
• at least a portion of the first plurality of finger elements is located in proximity to the third plate to induce capacitive coupling between the third plate and the at least the portion of the first plurality of finger elements responsive to the voltage potential difference applied across the first capacitor terminal and the second capacitor terminal;
• a first transmission line configured to electrically connect the first capacitor terminal to the first plurality of finger elements;
• and
• a second transmission line configured to electrically connect the second capacitor terminal to the second plurality of finger elements.