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US 11,380,718 B2Granted
Display panel and method of manufacturing same
AssigneeShenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
InventorHui Xiao
Life of this patent
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Abstract
A display panel and a method of manufacturing of the same are provided. The display panel includes a substrate and an active layer disposed on the substrate. The active layer includes a conductive and transparent first plate, and the first plate is provided with a dielectric layer. The dielectric layer is provided with a second plate, and the second plate and the dielectric layer are made of a transparent conductive material.
Claims4
A method of manufacturing a display panel, comprising steps of:
- S10, forming a buffer layer on a substrate;
- S20, forming a patterned active layer on the buffer layer by using indium gallium zinc oxide, the active layer comprising an active island and a first plate independent of the active island;
- S30, sequentially forming a gate insulating layer and a gate metal layer on the active island;
- S40, conducting a portion of the active island exposing the gate insulating layer to form a conductor layer, simultaneously conducting the first plate, forming a protective layer covering the conductor layer, and forming a dielectric layer covering the first plate;
- S50, forming an interlayer dielectric layer covering the active layer and the gate metal layer;
- S60, forming a second metal layer on the interlayer dielectric layer, and patterning the second metal layer to form a source/drain metal layer in contact with the conductor layer;
- S70, forming a passivation layer and a planarization layer on the interlayer dielectric layer;
- S80, forming an anode metal layer in contact with the source/drain metal layer on the planarization layer by using indium tin oxide, and simultaneously forming a second plate on the dielectric layer to form a storage capacitor with the first plate;
- and
- S90, forming a light emitting layer and a cathode metal layer on the anode metal layer.
7 more elements
Dependencies are inferred from the claim text.