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US 11,380,592 B2Granted
Techniques and configurations to reduce transistor gate short defects
AssigneeIntel Corporation
InventorsSridhar Govindaraju, Matthew J. Prince
Life of this patent
Estimating the term…
Abstract
Embodiments of the present disclosure describe techniques and configurations to reduce transistor gate short defects. In one embodiment, a method includes forming a plurality of lines, wherein individual lines of the plurality of lines comprise a gate electrode material, depositing an electrically insulative material to fill regions between the individual lines and subsequent to depositing the electrically insulative material, removing a portion of at least one of the individual lines to isolate gate electrode material of a first transistor device from gate electrode material of a second transistor device. Other embodiments may be described and/or claimed.
Claims25
An integrated circuit structure, comprising:
- a first fin structure having a long axis and a width, the long axis along a first direction;
- a second fin structure having a long axis and a width, the long axis along the first direction;
- a first gate electrode over the first fin structure, the first gate electrode having a long axis and a width, the long axis along a second direction orthogonal to the first direction;
- a second gate electrode over the second fin structure, the second gate electrode having a long axis and a width, the long axis along the second direction, wherein the long axis of the first gate structure and the long axis of the second gate structure are along a same central axis;
- a gate plug between the first gate electrode and the second gate electrode, the gate plug between the first fin structure and the second fin structure;
- a first contact electrode over the first fin structure, the first contact electrode having a long axis and a width, the long axis along the second direction;
- a second contact electrode over the second fin structure, the second contact electrode having a long axis and a width, the long axis along the second direction, wherein the long axis of the first contact electrode and the long axis of the second contact electrode are along a same central axis;
- and
- a contact plug between and in direct contact with the first contact electrode and the second contact electrode, the contact plug between the first fin structure and the second fin structure, and the contact plug separate and distinct from the gate plug, wherein the contact plug is offset from and overlapping with the gate plug along the first direction.
6 more elements
An integrated circuit structure, comprising:
- a first nanowire structure having a long axis and a width, the long axis along a first direction;
- a second nanowire structure having a long axis and a width, the long axis along the first direction;
- a first gate electrode over the first nanowire structure, the first gate electrode having a long axis and a width, the long axis along a second direction orthogonal to the first direction;
- a second gate electrode over the second nanowire structure, the second gate electrode having a long axis and a width, the long axis along the second direction, wherein the long axis of the first gate structure and the long axis of the second gate structure are along a same central axis;
- a gate plug between the first gate electrode and the second gate electrode, the gate plug between the first nanowire structure and the second nanowire structure;
- a first contact electrode over the first nanowire structure, the first contact electrode having a long axis and a width, the long axis along the second direction;
- a second contact electrode over the second nanowire structure, the second contact electrode having a long axis and a width, the long axis along the second direction, wherein the long axis of the first contact electrode and the long axis of the second contact electrode are along a same central axis;
- and
- a contact plug between and in direct contact with the first contact electrode and the second contact electrode, the contact plug between the first nanowire structure and the second nanowire structure, and the contact plug separate and distinct from the gate plug, wherein the contact plug is offset from and overlapping with the gate plug along the first direction.
6 more elements
An integrated circuit structure, comprising:
- a first fin structure having a long axis and a width, the long axis along a first direction;
- a second fin structure having a long axis and a width, the long axis along the first direction;
- a first gate electrode over the first fin structure, the first gate electrode having a long axis and a width, the long axis along a second direction orthogonal to the first direction;
- a second gate electrode over the second fin structure, the second gate electrode having a long axis and a width, the long axis along the second direction, wherein the long axis of the first gate structure and the long axis of the second gate structure are along a same central axis;
- a gate plug between the first gate electrode and the second gate electrode, the gate plug between the first fin structure and the second fin structure, the gate plug having a first end adjacent the first gate electrode and having a second end adjacent the second gate electrode;
- a first contact electrode over the first fin structure, the first contact electrode having a long axis and a width, the long axis along the second direction;
- a second contact electrode over the second fin structure, the second contact electrode having a long axis and a width, the long axis along the second direction, wherein the long axis of the first contact electrode and the long axis of the second contact electrode are along a same central axis;
- and
- a contact plug between and in direct contact with the first contact electrode and the second contact electrode, the contact plug between the first fin structure and the second fin structure, the contact plug having a first end adjacent the first contact electrode and having a second end adjacent the second contact electrode, and the contact plug separate and distinct from the gate plug, wherein the first end of the contact plug is not aligned with the first end of the gate plug along the first direction, and wherein the second end of the contact plug is not aligned with the second end of the gate plug along the first direction.
6 more elements
A computing device, comprising:
- a package substrate;
- and
- a die coupled to the package substrate, the die including an integrated circuit structure, comprising:
- a first fin structure having a long axis and a width, the long axis along a first direction;
- a second fin structure having a long axis and a width, the long axis along the first direction;
- a first gate electrode over the first fin structure, the first gate electrode having a long axis and a width, the long axis along a second direction orthogonal to the first direction;
- a second gate electrode over the second fin structure, the second gate electrode having a long axis and a width, the long axis along the second direction, wherein the long axis of the first gate structure and the long axis of the second gate structure are along a same central axis;
- a gate plug between the first gate electrode and the second gate electrode, the gate plug between the first fin structure and the second fin structure;
- a first contact electrode over the first fin structure, the first contact electrode having a long axis and a width, the long axis along the second direction;
- a second contact electrode over the second fin structure, the second contact electrode having a long axis and a width, the long axis along the second direction, wherein the long axis of the first contact electrode and the long axis of the second contact electrode are along a same central axis;
- and
- a contact plug between and in direct contact with the first contact electrode and the second contact electrode, the contact plug between the first fin structure and the second fin structure, and the contact plug separate and distinct from the gate plug, wherein the contact plug is offset from and overlapping with the gate plug along the first direction.
9 more elements
Dependencies are inferred from the claim text.