Semiconductor device and manufacturing method of semiconductor device including a through electrode for connection of wirings
AssigneeSony Semiconductor Solutions Corporation
InventorTakushi Shigetoshi
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AssigneeSony Semiconductor Solutions Corporation
InventorTakushi Shigetoshi
Estimating the term…
Damage to a semiconductor device at the time of forming a via hole in which a through electrode is arranged is prevented. The semiconductor device includes a cylindrical insulating film, a front surface side pad, a conductor layer, and a back surface side pad. The cylindrical insulating film is configured in a cylindrical shape penetrating a semiconductor substrate. The front surface side pad is formed adjacent to a front surface of the semiconductor substrate inside the cylindrical insulating film. The conductor layer is arranged adjacent to the front surface side pad and an inner side of the cylindrical insulating film after removing the semiconductor substrate inside the cylindrical insulating film adjacent to the front surface side pad. The back surface side pad is arranged on a back surface of the semiconductor substrate and is connected to the front surface side pad via the conductor layer.
A semiconductor device, comprising:
A manufacturing method of a semiconductor device, comprising:
Dependencies are inferred from the claim text.