Transfer method and transfer system
AssigneeTokyo Electron Limited
InventorsKippei Sugita, Daisuke Kawano, Yoshihiro Yanagi
Life of this patent
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Abstract
A transfer method according to an exemplary embodiment includes: transferring a focus ring onto a stage by a transfer unit; transferring a measuring instrument into an inner region of the transferred focus ring and onto an electrostatic chuck; acquiring a measurement value group by the transferred measuring instrument; and adjusting a transfer position of the focus ring by the transfer unit such that the central position of the electrostatic chuck and the central position of the focus ring coincide with each other based on the measurement value group.
Claims14
A transfer system of a focus ring comprising:
- a processing system;
- and
- a measuring instrument, wherein
- the processing system includes
- a processing apparatus including a chamber body and a stage that is provided in a chamber provided by the chamber body and includes an electrostatic chuck, and
- a transfer unit configured to transfer the focus ring onto the stage, and to transfer the measuring instrument into an inner region surrounded by the focus ring and onto the electrostatic chuck, wherein
- the measuring instrument is configured to obtain an amount of deviation of a central position of the focus ring with respect to a central position of the electrostatic chuck based on a measurement value group obtained by the measuring instrument, in a state where the measuring instrument is positioned in the inner region and on the electrostatic chuck, and
- wherein the transfer unit is configured to adjust a transfer position of the focus ring such that the central position of the electrostatic chuck and the central position of the focus ring coincide with each other based on the amount of deviation.
Dependencies are inferred from the claim text.