Substrate transfer apparatus, substrate processing apparatus including the same, and substrate misalignment compensation method

A substrate transfer apparatus for transferring a substrate, comprising:

• a support part configured to support the substrate;
• a driving unit configured to move the support part;
• and
• a control unit configured to control a movement of the driving unit,
• wherein the control unit includes:
• a sensor module configured to obtain first coordinates of the substrate transfer apparatus and second coordinates measured by a plurality of sensors installed on the substrate transfer apparatus while moving the substrate transfer apparatus in one direction;
• a calculation device configured to calculate a calibration value of the substrate transfer apparatus by using an equation of a circle centered at the first coordinates and an equation passing through a line for the second coordinates;
• and
• a compensation device configured to calculate the center of a circle to determine a center of the substrate based on the calibration value of the substrate transfer apparatus and compensate for misalignment of the substrate by using the center of the circle.

An apparatus for processing a substrate, the apparatus comprising:

• a processing module including a process chamber in which a process is performed on the substrate;
• a load port on which a carrier having the substrate received therein is placed;
• and
• a substrate transfer apparatus configured to transfer the substrate,
• wherein the substrate transfer apparatus includes:
• a support part configured to support the substrate;
• a driving unit configured to move the support part;
• and
• a control unit configured to control a movement of the driving unit, and
• wherein the control unit includes:
• a sensor module configured to obtain first coordinates of the substrate transfer apparatus and second coordinates measured by a plurality of sensors installed on the substrate transfer apparatus while moving the substrate transfer apparatus in one direction;
• a calculation device configured to calculate a calibration value of the substrate transfer apparatus by using an equation of a circle centered at the first coordinates and an equation of a line passing through the second coordinates;
• and
• a compensation device configured to calculate the center of a circle to determine a center of the substrate based on the calibration value of the substrate transfer apparatus and compensate for misalignment of the substrate by using the center of the circle.