Cleaning device, substrate processing apparatus, maintenance method of cleaning device, and computer-readable recording medium including maintenance program of cleaning device

A cleaning device comprising:

• an elastically deformable cleaning member;
• a moving portion capable of pressing the cleaning member with respect to a surface of a reference member;
• a measurement portion measuring a load of the cleaning member with respect to the reference member;
• and
• a controller configured to control the moving portion based on a measurement value of the measuring portion,
• wherein the controller configured to perform a reset operation comprising:
• pressing the cleaning member against the reference member before cleaning by moving the cleaning member toward the substrate,
• after the measured value of the measurement portion reaches a predetermined reset load, move the cleaning member in a direction away from the reference member in a plurality of unit movement amounts,
• after two consecutive measurement values of the measurement portion for the plurality of unit movement amounts are determined to be equal to each other, set a position of the cleaning member at the time for use as a reference position of the cleaning member at the time of cleaning and set the measurement value of the measurement portion at the time for use as a pressing reference value at the time of cleaning.