Carrier device, work processing apparatus, control method of carrier device and storage medium storing program

A work processing apparatus, comprising:

• a carrier device, comprising:
• a body;
• a rotational part provided to be rotatable relative to the body;
• an arm supported on the rotational part;
• an end effector provided in a leading end portion of the arm and configured to hold a work;
• a gas supply unit comprising at least one of a gas supply line or a supply port configured to supply a gas to an arm-side internal space and outside an actuator for driving the end effector, to fill the arm-side internal space with the gas, the arm-side internal space provided in an arm-side base portion of the end effector and/or in the leading end portion of the arm;
• and an exhaust unit provided in a body-side internal space that communicates with the arm-side internal space and configured to discharge the gas filled in the arm-side internal space and/or in the body-side internal space;
• and
• a work processing module configured to process the work conveyed by the carrier device.

A control method of a carrier device of a work,

• wherein the carrier device comprises a body;
• a rotational part provided to be rotatable relative to the body;
• an arm supported on the rotational part;
• and an end effector provided in a leading end portion of the arm and configured to hold a work,
• the control method comprising:
• a gas supply process of supplying a gas to an arm-side internal space and outside an actuator for driving the end effector to fill the arm-side internal space with the gas, the arm-side internal space provided in an arm-side base portion of the end effector and/or in the leading end portion of the arm;
• a supply amount control process of controlling a supply amount of the gas that is to be supplied to the arm-side internal space;
• and
• an exhaust process of discharging the gas filled in the arm-side internal space and/or a body-side internal space that communicates with the arm-side internal space,
• wherein the supply amount control process comprises performing on/off control of a supply of the gas to the arm-side internal space and/or control of the supply amount of the gas to the arm-side internal space, according to an atmospheric pressure of an external environment of the carrier device or a discharge amount in the exhaust process.

A non-volatile storage medium configured to store a program that operates a computer to perform a control method of a carrier device of a work,

• wherein the carrier device comprises a body;
• a rotational part provided to be rotatable relative to the body;
• an arm supported on the rotational part;
• an end effector provided in a leading end portion of the arm and configured to hold a work,
• the program comprises:
• a gas supply process of controlling a gas supply unit comprising at least one of a gas supply line or a supply port to supply a gas to an arm-side internal space and outside an actuator for driving the end effector to fill the arm-side internal space with the gas, the arm-side internal space provided in an arm-side base portion of the end effector and/or in the leading end portion of the arm;
• a supply amount control process of controlling a supply amount controller to control a supply amount of the gas that is to be supplied to the arm-side internal space, the supply amount controller including at least one of a flow control valve, an on-off valve or an orifice;
• and
• an exhaust process of controlling an exhaust unit to discharge the gas filled in the arm-side internal space and/or a body-side internal space that communicates with the arm-side internal space,
• wherein the supply amount control process comprises performing on/off control of a supply of the gas to the arm-side internal space and/or control of the supply amount of the gas to the arm-side internal space, according to an atmospheric pressure of an external environment of the carrier device or a discharge amount by the exhaust unit.

A carrier device, comprising:

• a body;
• a rotational part provided to be rotatable relative to the body;
• an arm supported on the rotational part;
• an end effector provided in a leading end portion of the arm and configured to hold a work;
• a gas supply unit comprising at least one of a gas supply line or a supply port configured to supply a gas to an arm-side internal space provided in an arm-side base portion of the end effector and/or in the leading end portion of the arm to fill the arm-side internal space with the gas to suppress dew condensation in the arm-side internal space and a body-side internal space that communicates with the arm-side internal space;
• and
• an exhaust unit provided in the body-side internal space and configured to discharge the gas filled in the arm-side internal space and/or in the body-side internal space to suppress a leakage of particles from the arm-side internal space and the body-side internal space.

A work processing apparatus, comprising:

• a carrier device, comprising:
• a body;
• a rotational part provided to be rotatable relative to the body;
• an arm supported on the rotational part;
• an end effector provided in a leading end portion of the arm and configured to hold a work;
• a gas supply unit comprising at least one of a gas supply line or a supply port configured to supply a gas to an arm-side internal space provided in an arm-side base portion of the end effector and/or in the leading end portion of the arm, to fill the arm-side internal space with the gas to suppress dew condensation in the arm-side internal space and a body-side internal space that communicates with the arm-side internal space;
• and an exhaust unit provided in the body-side internal space and configured to discharge the gas filled in the arm-side internal space and/or in the body-side internal space to suppress a leakage of particles from the arm-side internal space and the body-side internal space;
• and
• a work processing module configured to process the work conveyed by the carrier device.

A control method of a carrier device of a work,

• wherein the carrier device comprises a body;
• a rotational part provided to be rotatable relative to the body;
• an arm supported on the rotational part;
• and an end effector provided in a leading end portion of the arm and configured to hold a work,
• the control method comprising:
• a gas supply process of supplying a gas to an arm-side internal space provided in an arm-side base portion of the end effector and/or in the leading end portion of the arm, to fill the arm-side internal space with the gas to suppress dew condensation in the arm-side internal space and a body-side internal space that communicates with the arm-side internal space;
• a supply amount control process of controlling a supply amount of the gas that is to be supplied to the arm-side internal space;
• and
• an exhaust process of discharging the gas filled in the arm-side internal space and/or the body-side internal space to suppress a leakage of particles from the arm-side internal space and the body-side internal space,
• wherein the supply amount control process comprises performing on/off control of a supply of the gas to the arm-side internal space and/or control of the supply amount of the gas to the arm-side internal space, according to an atmospheric pressure of an external environment of the carrier device or a discharge amount in the exhaust process.

A non-volatile storage medium configured to store a program that operates a computer to perform a control method of a carrier device of a work,

• wherein the carrier device comprises a body;
• a rotational part provided to be rotatable relative to the body;
• an arm supported on the rotational part;
• an end effector provided in a leading end portion of the arm and configured to hold a work,
• the program comprises:
• a gas supply process of controlling a gas supply unit comprising at least one of a gas supply line or a supply port to supply a gas to an arm-side internal space provided in an arm-side base portion of the end effector and/or in the leading end portion of the arm, to fill the arm-side internal space with the gas to suppress dew condensation in the arm-side internal space and a body-side internal space that communicates with the arm-side internal space;
• a supply amount control process of controlling a supply amount controller to control a supply amount of the gas that is to be supplied to the arm-side internal space, the supply amount controller including at least one of a flow control valve, an on-off valve or an orifice;
• and
• an exhaust process of controlling an exhaust unit to discharge the gas filled in the arm-side internal space and/or the body-side internal space to suppress a leakage of particles from the arm-side internal space and the body-side internal space,
• wherein the supply amount control process comprises performing on/off control of a supply of the gas to the arm-side internal space and/or control of the supply amount of the gas to the arm-side internal space, according to an atmospheric pressure of an external environment of the carrier device or a discharge amount by the exhaust unit.