Laser annealing device and thin film crystallization and dehydrogenation method using same
AssigneeSamsung Display Co., Ltd.
InventorsDong-Min Lee, Ji-Hwan Kim, Jongoh Seo, Byung Soo So
Life of this patent
Estimating the term…
Abstract
A laser annealing device includes a stage, a laser generator, and a reflective member. The stage supports a substrate with a thin film formed thereon to be processed, and may be moved in a first direction at a set or predetermined speed. The laser generator irradiates a first area of the thin film with a laser beam while the stage is moved. The reflective member reflects a part of the laser beam, which is reflected from the first area of the thin film, to a second area of the thin film. The first area and the second area are spaced apart from each other.
Claims18
A laser annealing device comprising:
- a stage to support a substrate with a thin film to be processed formed thereon, and to be moved in a first direction at a set speed;
- a laser generator to irradiate a first area of the thin film with a laser beam while the stage is moved;
- and
- a reflective member to reflect a part of the laser beam, which is reflected from the first area of the thin film, to a second area of the thin film,
- wherein the first area and the second area are spaced apart from each other by a set distance in a second direction opposite to the first direction.
A thin film crystallization method using a laser annealing device, the method comprising:
- positioning a substrate on a stage, the substrate being with a thin film to be processed formed thereon;
- moving the stage in a first direction at a set or predetermined speed;
- irradiating a first area of the thin film with a laser beam;
- and
- reflecting a part of the laser beam, which is reflected from the first area of the thin film, to a second area of the thin film,
- wherein, while the stage is moved, a crystallization process is performed through the laser beam irradiated to the first area after a dehydrogenation process is performed through the part of the laser beam irradiated to the second area, and
- the first area and the second area are spaced apart from each other by a set distance in a second direction opposite to the first direction.
Dependencies are inferred from the claim text.