Measurement system and method for setting observation conditions of measurement apparatus

A method for setting observation conditions set for a measurement apparatus in a measurement system including the measurement apparatus observing a sample based on an observation condition including a plurality of parameters,

• the measurement system including a control unit calculating information on an observation condition of a sample;
• and an observation condition database storing first data in which a search key related to the sample and the observation condition set in a case where the sample is observed are associated with each other, and
• the method for setting observation conditions includes:
• a first step of receiving, by the control unit, an observation condition search request including a search key related to a target sample;
• a second step of referring, by the control unit, the observation condition database to search for the first data matching or similar to the search key related to the target sample included in the observation condition search request;
• a third step of calculating, by the control unit, a candidate observation condition of the measurement apparatus for observing the target sample based on the searched first data;
• a fourth step of adjusting, by the control unit, at least one parameter included in the candidate observation condition to calculate new candidate observation condition in a case where a result of a measurement performed by the measurement apparatus based on the candidate observation condition does not satisfy a condition;
• and
• a fifth step of generating, by the control unit, display data for presenting the candidate observation condition to output the display data.