Charged particle beam system
AssigneeHitachi High-Tech Corporation
InventorHirokazu Tamaki
Life of this patent
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Abstract
A control system of a charged particle beam apparatus obtains a first coefficient by performing multiple resolution analysis based on wavelet transform or discrete wavelet transform on at least a part of an image or a signal acquired by the charged particle beam apparatus. The control system obtains a second coefficient by performing, on at least a part of the first coefficient or an absolute value of the first coefficient, any one of calculation of a maximum value, calculation of a numerical value corresponding to a specified order in an order related to a magnitude, fitting to a histogram, calculation of an average value, and calculation of a total sum.
Claims20
A charged particle beam system comprising:
- a charged particle beam apparatus;
- and
- a control system that analyzes an image obtained by the charged particle beam apparatus, wherein
- the control system
- obtains a first coefficient by performing multiple resolution analysis based on wavelet transform or discrete wavelet transform on at least a part of an image or a signal acquired by the charged particle beam apparatus, and
- obtains a second coefficient by performing, on at least a part of the first coefficient or an absolute value of the first coefficient, any one of calculation of a maximum value, calculation of a numerical value corresponding to a specified order in an order related to a magnitude, fitting to a histogram, calculation of an average value, and calculation of a total sum.
A charged particle beam system, comprising:
- a charged particle beam apparatus;
- and
- a control system that analyzes an image obtained by the charged particle beam apparatus, wherein
- the control system
- obtains a first coefficient by performing one of multiple resolution analysis, Fourier transform, and convolution operation based on wavelet transform or discrete wavelet transform on at least a part of an image or a signal acquired by the charged particle beam apparatus, obtains a second coefficient by performing, on at least a part of the first coefficient or an absolute value of the first coefficient, any one of calculation of a maximum
- obtains a second coefficient by performing, on at least a part of the first coefficient or an absolute value of the first coefficient, any one of calculation of a maximum value, calculation of a numerical value corresponding to a specified order in an order related to a magnitude, fitting to a histogram, calculation of an average value, and calculation of a total sum, and
- obtains a third coefficient by obtaining any one of a product, a sum, and an average value obtained using the product or the sum for a plurality of the obtained second coefficients.
Dependencies are inferred from the claim text.