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US 11,380,511 B2Granted
Charged particle beam source
AssigneeFEI Company
InventorsKun Liu, Steven J. Randolph
Life of this patent
Estimating the term…
Abstract
A charged particle beam source, such as for use in an electron microscope, can include an electrically conductive support member coupled to a base, a mounting member coupled to the support member and defining a bore, and an emitter member received in the bore and retained by a fixative material layer flowed around the emitter member in the bore.
Claims20
A charged particle beam source, comprising:
- an electrically conductive support member coupled to a base;
- a mounting member coupled to the support member and defining a bore, the mounting member further comprising an opening that is a channel defined in a side wall of the mounting member that is in communication with the bore, the channel being offset from a free end of the mounting member in a direction toward the support member;
- and
- an emitter member received in the bore and retained by a fixative material layer flowed around the emitter member in the bore, wherein fixative material of the fixative material layer is received in the channel.
1 more element
A charged particle beam source, comprising:
- an electrically conductive support member coupled to a base;
- a mounting member coupled to the support member and defining a bore, the mounting member further comprising an opening that is a channel defined in a side wall of the mounting member that is in communication with the bore, the channel being offset from a free end of the mounting member in a direction toward the support member;
- and
- an emitter member received in the bore and retained by a fixative material layer flowed around the emitter member in the bore, wherein fixative material of the fixative material layer is received in the channel;
- wherein the fixative material layer is formed from a dispersed phase of a colloidal liquid.
2 more elements
A method of making a charged particle beam source, comprising:
- forming a bore in a mounting member, the mounting member being coupled to an electrically conductive support member that is coupled to a base;
- forming a channel in a side wall of the mounting member that is in communication with the bore, the channel being offset from a free end of the mounting member in a direction toward the support member;
- inserting an emitter member into the bore in the mounting member;
- and
- flowing a colloidal liquid around the emitter member and the mounting member to form a fixative material layer that retains the emitter member in the bore, fixative material of the fixative material layer being received in the channel.
2 more elements
A charged particle beam source, comprising:
- an electrically conductive support member coupled to a base;
- a mounting member coupled to the support member and defining a bore, the mounting member further comprising an opening that is a channel defined in a side wall of the mounting member that is in communication with the bore, the channel being offset from a free end of the mounting member in a direction toward the support member;
- and
- an emitter member received in the bore and retained by a fixative material layer formed from a dispersed phase of a colloidal liquid, wherein fixative material of the fixative material layer is received in the channel;
- wherein the mounting member comprises a retaining portion that extends around the emitter member.
2 more elements
A charged particle beam source, comprising:
- an electrically conductive support member coupled to a base;
- a mounting member coupled to the support member and defining a bore, the mounting member comprising an opening that is a channel defined in a side wall of the mounting member and that is offset from a free end of the mounting member in a direction toward the support member, the channel being in communication with the bore;
- and
- an emitter member received in the bore and retained in the bore by a fixative material layer that is received in the channel in the mounting member and coats the emitter member in the bore;
- wherein a cross-section of the bore is larger than a cross-section of the emitter member.
2 more elements
Dependencies are inferred from the claim text.