Thermally conductive pipe, thermal processing device, and processing system

Abstract

A thermally conductive pipe includes a pipe having closed both end portions; a working fluid that is enclosed in inside of the pipe and that is vaporized and liquefied; and a liquid transfer member that extends in a longitudinal direction of the inside of the pipe and that transfers the liquefied working fluid at least in the longitudinal direction. An occupancy rate of a cross-sectional area of the liquid transfer member to a cross-sectional area in a transverse direction of the inside of the pipe is in a range of 20% or more and 50% or less.

Dependencies are inferred from the claim text.