Method for determining contribution to a fingerprint

A system comprising a hardware processor configured to determine a contribution of a device out of a plurality of devices to a fingerprint of a parameter, the parameter being associated with processing of a substrate, the processor configured to at least:

• obtain parameter data and usage data, wherein the parameter data is based on measurements for multiple substrates having been processed by the plurality of devices, and the usage data indicates which one or more devices out of the plurality of devices were used in the processing of each substrate;
• group the parameter data in accordance with the usage data;
• and
• determine, based on the usage data and the grouped parameter data, the contribution.

A computer program product comprising a computer-readable medium having instructions therein, the instructions, upon execution by a computer system, configured to cause the computer system to at least:

• obtain parameter data and usage data, wherein the parameter data is based on measurements for multiple substrates having been processed by a plurality of devices, and the usage data indicates which one or more devices out of the plurality of devices were used in the processing of each substrate;
• group the parameter data in accordance with the usage data;
• and
• determine, based on the usage data and the grouped parameter data, a contribution to a parameter fingerprint of a device out of a plurality of devices, the parameter being associated with processing of a substrate.