Inspection system and temperature measuring method for inspection system

An inspection system comprising:

• at least one inspection device having a stage on which a substrate is mounted and configured to inspect the substrate on the stage;
• a temperature control mechanism configured to control a temperature of the stage;
• a substrate accommodating part configured to accommodate the substrate;
• a temperature measurement substrate standby part configured to making a temperature measurement substrate to be mounted on the stage wait;
• a transfer unit configured to transfer the substrate accommodated in the substrate accommodating part and the temperature measurement substrate waiting at the temperature measurement substrate standby part onto the stage;
• and
• a camera used for aligning the substrate on the stage,
• wherein the temperature measurement substrate has a temperature measurement member whose state changes depending on a temperature on a surface of the temperature measurement substrate, and
• the temperature measurement substrate is transferred from the temperature measurement substrate standby part onto the stage by the transfer unit, and the camera images the temperature measurement member so that a temperature of the temperature measurement substrate is measured from a change in the state of the temperature measurement member.