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US 11,378,584 B2Granted
Angular velocity sensor, electronic apparatus, and vehicle
AssigneeSeiko Epson Corporation
InventorsKazuyuki Nagata, Takayuki Kikuchi
Life of this patent
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Abstract
An angular velocity sensor includes a substrate, a detector including a movable detection electrode and a fixed detection electrode opposed to the movable detection electrode, and a driver adapted to drive the detector. The movable detection electrode is supported by a first spring that is elongated parallel to a Y axis from a first turned-back part, and a second spring that is elongated parallel to the Y axis from a second turned-back part. The first and second springs are fixed at first and second anchors. The first turned-back part is closer to the second spring than the first anchor. The detector includes a first surface opposed to the first spring, and a second surface disposed closer to the first spring than the first surface.
Claims13
An angular velocity sensor comprising:
- a substrate having a thickness in a direction parallel to a Z axis which is one of three axes that are perpendicular to each other and include an X axis, a Y axis and the Z axis;
- a detection section including:
- a first detection electrode supported by the substrate to be translatable in a direction parallel to the X axis;
- and
- a second detection electrode fixed to the substrate and interdigitated with the first detection electrode;
- and
- a driver supported by the substrate and configured to drive the detection section,
- wherein the first detection electrode is supported by:
- a first spring section that is elongated in a direction parallel to the Y axis from a first turned-back part, the first spring section being displaceable in a direction parallel to the X axis;
- and
- a second spring section that is elongated in a direction parallel to the Y axis from a second turned-back part, the second spring section being displaceable in a direction parallel to the X axis, the
- the first spring section is fixed to the substrate by a first anchor,
- the second spring section is fixed to the substrate by a second anchor,
- the first turned-back part is closer to the second spring section than the first anchor is in a direction parallel to the Y axis,
- the detection section includes:
- a first surface facing the first spring section in a direction parallel to the X axis;
- and
- a second surface located inwardly toward the second spring section relative to the first surface in a direction parallel to the Y axis, and
- a distance in a direction parallel to the X axis between the first surface and the first spring section is longer than a distance in the direction parallel to the X axis between the first spring section and a plane of the second surface in a direction parallel to the Y axis.
16 more elements
An angular velocity sensor comprising:
- a substrate having a thickness in a direction parallel to a Z axis which is one of three axes that are perpendicular to each other and include an X axis, a Y axis and the Z axis;
- a detection section including:
- a first detection electrode supported by the substrate to be translatable in a direction parallel to the X axis;
- and
- a second detection electrode fixed to the substrate and interdigitated with the first detection electrode;
- and
- a driver supported by the substrate and configured to drive the detection section,
- wherein the first detection electrode is supported by:
- a first spring section that is elongated in a direction parallel to the Y axis from a first turned-back part, the first spring section being displaceable in a direction parallel to the X axis;
- and
- a second spring section that is elongated in a direction parallel to the Y axis from a second turned-back part, the second spring section being displaceable in a direction parallel to the X axis, the
- the first spring section is fixed to the substrate by a first anchor,
- the second spring section is fixed to the substrate by a second anchor,
- the first turned-back part is closer to the second spring section than the first anchor is in a direction parallel to the Y axis, and
- a distance between the detection section and the first spring section in a direction parallel to the X axis increases as the first spring section extends away from the first turned-back part toward the first anchor.
12 more elements
An angular velocity sensor comprising:
- a substrate having a thickness in a direction parallel to a Z axis which is one of three axes that are perpendicular to each other and include an X axis, a Y axis and the Z axis;
- a detection section including:
- a first detection electrode supported by the substrate to be translatable in a direction parallel to the X axis;
- and
- a second detection electrode fixed to the substrate and interdigitated with the first detection electrode;
- and
- a driver supported by the substrate and configured to drive the detection section,
- wherein the first detection electrode is supported by:
- a first spring section that is elongated in a direction parallel to the Y axis from a first turned-back part, the first spring section being displaceable in a direction parallel to the X axis, the and
- a second spring section that is elongated in a direction parallel to the Y axis from a second turned-back part, the second spring section being displaceable in a direction parallel to the X axis;
- the
- the first spring section is fixed to the substrate by a first anchor,
- the second spring section is fixed to the substrate by a second anchor,
- the first turned-back part is closer to the second spring section than the first anchor is in a direction parallel to the Y axis,
- a distance between the detection section and the first spring section in a direction parallel to the X axis increases as the first spring section extends away from the first anchor toward the first turned-back part.
12 more elements
Dependencies are inferred from the claim text.