Gas sensor and manufacturing method thereof, and gas sensing system
AssigneeI-Shou University
InventorsChi-Yen Shen, Tien-Tsan Hung, Jing-Jay Chiu, Ming Wen Yang
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Abstract
A gas sensor comprises a basic part and a sensing layer deposited on the basic part. The basic part includes a circuit board and at least one surface acoustic wave element disposed on the circuit board. The sensing layer is a nanocomposite film of reduced graphene oxide/tungsten oxide/polypyrrole deposited on the surface acoustic wave element. The sensing layer combines reduced graphene oxide, metal oxide, and conductive polymer, so that the sensing layer is able to perform sensing at room temperature, and can be more sensitive. The present invention provides a method for manufacturing a gas sensor, and a gas sensing system including the gas sensor.
Claims8
A gas sensor comprising:
- a basic part including a circuit board, and at least one surface acoustic wave element disposed on the circuit board;
- and
- a sensing layer deposited on the surface acoustic wave element, wherein the sensing layer is a nanocomposite film of reduced graphene oxide, and tungsten oxide, and polypyrrole;
- wherein in the sensing layer, a weight ratio of reduced graphene oxide:
- tungsten oxide:
- polypyrrole is between 1:1:2 and 3:1:5.
A gas sensing system comprising:
- a bearing unit provided with a gas flow channel;
- a gas sensor disposed in the bearing unit and capable of sensing the gas flowing from the gas flow channel, wherein the gas sensor includes a basic part and a sensing layer deposited on the basic part, the basic part is provided with a circuit board, and at least one surface acoustic wave element disposed on the circuit board, and the sensing layer is a nanocomposite film of reduced graphene oxide, and tungsten oxide, and polypyrrole;
- and
- a detecting unit electrically connected to the gas sensor;
- wherein in the sensing layer, a weight ratio of reduced graphene oxide:
- tungsten oxide:
- polypyrrole is between 1:1:2 and 3:1:5.
A manufacturing method of a gas sensor comprising:
- a basic part manufacturing step to place a surface acoustic wave element on a circuit board;
- and a sensing layer manufacturing step, tungsten oxide gel and reduced graphene oxide are added into pyrrole monomers to prepare a nanocomposite gel of reduced graphene oxide, and tungsten oxide, and polypyrrole by an in-situ chemical oxidative polymerization approach, and the nanocomposite gel is coated on the surface acoustic wave element and dried to form a sensing layer, wherein the sensing layer is a nanocomposite film of reduced graphene oxide, and tungsten oxide, and polypyrrole.
Dependencies are inferred from the claim text.