Nanofluid sensor with real-time spatial sensing

A method of sensing nanoparticles within a nanofluid, said method comprising:

• providing a nanofluid sensor, said nanofluid sensor comprising:
• an array of gate structures, each gate structure of the array of gate structures is located on a semiconductor material portion;
• an interlevel dielectric material surrounding said array of gate structures;
• a vertical inlet channel located within a portion of said interlevel dielectric material and located on one side of said array of gate structures;
• a vertical outlet channel located within another portion of said interlevel dielectric material and located on another side of said array of gate structures;
• a horizontal channel connected to said vertical inlet and outlet channels, located beneath said array of gate structures, and vertically separating said array of gate structures from a handle substrate;
• and
• a back gate dielectric material portion lining exposed surfaces within said vertical inlet channel, said vertical outlet channel and said horizontal channel, wherein said back gate dielectric material portion extends to at least a topmost surface of said interlevel dielectric material;
• adding a nanofluid containing nanoparticles into said vertical inlet channel;
• flowing said nanofluid through said vertical inlet channel and into said horizontal channel;
• and
• measuring and recording characteristics of each gate structure of said array of gate structures as said nanofluid passes through said horizontal channel.