Method for producing a nanofilm, sensor arrangement comprising a nanofilm, and nanosieve comprising a nanofilm
AssigneeInfineon Technologies AG
InventorsDerek Debie, Alexander Zoepfl
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Abstract
A method for producing a nanofilm includes providing a microsieve having a first and a second opposite surface region, wherein micropores are formed between the first and second surface regions; applying a nanomaterial suspension on the first surface region of the microsieve, wherein the nanomaterial suspension comprises nanomaterial particles; and creating a pressure difference at a plurality of the micropores between the first and second surface region of the microsieve in order to move the nanomaterial suspension into the micropores and/or through the micropores, such that the nanomaterial particles adhere to the first surface region and to the wall regions of the micropores and form the nanofilm.
Claims18
A method for producing a nanofilm, the method comprising:
- providing a microsieve having a first and a second opposite surface region, wherein micropores are formed extending through the first and second surface regions;
- applying a nanomaterial suspension on the first surface region of the microsieve, wherein the nanomaterial suspension comprises nanomaterial particles;
- and
- creating a pressure difference at a plurality of the micropores between the first and second surface region of the microsieve in order to move the nanomaterial suspension into the micropores and/or through the micropores, such that the nanomaterial particles adhere to the first surface region and to wall regions of the micropores and form the nanofilm,
- wherein the nanofilm comprises a self-supporting horizontal portion spanning the micropores.
A sensor arrangement comprising a nanofilm configured as a sensor element, wherein the nanofilm comprises:
- a microsieve having a first and a second opposite surface region, wherein micropores are formed extending through the first and second surface regions;
- and
- a nanomaterial suspension on the first surface region of the microsieve, wherein the nanomaterial suspension comprises nanomaterial particles,
- wherein the nanofilm is configured for creating a pressure difference at a plurality of the micropores between the first and second surface region of the microsieve in order to move the nanomaterial suspension into the micropores and/or through the micropores, such that the nanomaterial particles adhere to the first surface region and to wall regions of the micropores and form the nanofilm, wherein the nanofilm comprises a self-supporting horizontal portion spanning the micropores, and wherein the nanofilm is configured for detecting a measurement variable.
A nanosieve comprising a nanofilm, wherein the nanofilm comprises:
- a microsieve having a first and a second opposite surface region, wherein micropores are formed extending through the first and second surface regions;
- and
- a nanomaterial suspension on the first surface region of the microsieve, wherein the nanomaterial suspension comprises nanomaterial particles,
- wherein the nanofilm is configured for creating a pressure difference at a plurality of the micropores between the first and second surface region of the microsieve in order to move the nanomaterial suspension into the micropores and/or through the micropores, such that the nanomaterial particles adhere to the first surface region and to wall regions of the micropores and form the nanofilm, wherein the nanomaterial suspension is moved by the pressure difference into the micropores, which are mechanically connected to one another by webs, in order to form the nanofilm furthermore regionally in the micropores and in a manner spanning the micropores between the webs and on the webs at the microsieve, wherein the nanofilm comprises a self-supporting horizontal portion spanning the micropores, and wherein the nanofilm has nanopores in the regions spanning the webs, in order to form a nanosieve.
Dependencies are inferred from the claim text.