Clean room and method for regulating airflow of clean room
AssigneesHkc Corporation Limited, Chongqing Hkc Optoelectronics Technology Co., Ltd.
InventorChunchin Huang
Life of this patent
Estimating the term…
Abstract
A clean room and a method for regulating an airflow of the clean room. The clean room includes: a plurality of process spaces in communication with one another, and a fan filter unit. The fan filter units is installed at a top of each one of the plurality of process spaces, and a bottom of each of the plurality of process spaces is provided with a ventilation passage. The clean room further includes: an airflow regulation device, configured to regulate an airflow in each of the process spaces; the airflow regulation device is installed inside each of the plurality of process spaces, and is arranged downstream of the respective fan filter unit.
Claims17
A clean room, comprising:
- a plurality of process spaces in communication with one another, and
- a fan filter unit, installed at a top of each one of the plurality of process spaces, and a bottom of each of the plurality of process spaces is provided with a ventilation passage;
- wherein, the clean room further comprises:
- an airflow regulation device, configured to regulate an airflow in each of the process spaces;
- and wherein the airflow regulation device is installed inside each of the plurality of process spaces, and is arranged downstream of the respective fan filter unit;
- the airflow regulation device comprises a first perforated plate and a second perforated plate;
- the first perforated plate and the second perforated plate are stacked with each other, and the first perforated plate and the second perforated plate are in surface contact with each other;
- the first perforated plate and the second perforated plate respectively define therein airflow channels, when the first perforated plate and the second perforated plate are stacked with each other, the airflow channels of the first perforated plate and the airflow channels of the second perforated plate at least partially align or misalign with each other;
- and
- contact surfaces between the first perforated plate and the second perforated plate are respectively provided with wear resistant layers.
Dependencies are inferred from the claim text.