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US 11,378,202 B2Granted
Vacuum valve having a pressure sensor
AssigneeVAT Holding AG
InventorsAdrian Eschenmoser, Andreas Hofer
Life of this patent
Estimating the term…
Abstract
Disclosed is a vacuum valve including a valve closure and a preferably pneumatic or electro-pneumatic drive unit having a pressure medium, said drive unit being coupled to the valve closure. The vacuum valve also has a pressure sensor such that a pressure of the pressure medium can be measured.
Claims18
A vacuum valve, for regulating a volume or mass flow and/or for gas-tight interruption of a flow path, comprising:
- a valve seat which has a valve opening defining an opening axis (H) and a first sealing surface surrounding the valve opening,
- a valve closure for regulating the volume or mass flow and/or for interrupting the flow path, having a second sealing surface corresponding to the first sealing surface, the variable location of which second sealing surface is determined by a respective position and alignment of the valve closure,
- at least one drive unit, which is coupled to the valve closure, comprising at least one piston-cylinder unit comprising at least one piston and a cylinder borehole, wherein the drive unit furthermore has a pressure medium to be applied to at least one pressure-active surface (F1, F2) of the piston, so that by means of the drive unit,
- wherein the valve closure is adjustable from an open position (O), in which the valve closure and the valve seat are present without contact relative to one another, into a closed position (G), in which an axially sealing contact with respect to the opening axis (H) exists between the first sealing surface and the second sealing surface via an interposed seal and the valve opening is thereby closed in a gas-tight manner, and back again,
- wherein the vacuum valve furthermore comprises at least one pressure sensor, and
- wherein the pressure sensor is designed and arranged such that a pressure measurement of the pressure medium can be carried out.
3 more elements
A method for controlling a vacuum valve wherein the vacuum valve is designed for the regulation of a volume or mass flow and/or for the gas-tight interruption of a flow path and the vacuum valve, comprising:
- a valve seat, which has a valve opening defining an opening axis (H) and a first sealing surface circumferential around the valve opening,
- a valve closure for the regulation of the volume or mass flow and/or for the interruption of the flow path, comprising a second sealing surface corresponding to the first sealing surface, the variable location of which second sealing surface is determined by a respective position and alignment of the valve closure,
- at least one drive unit, which is coupled to the valve closure, comprising at least one piston-cylinder unit comprising at least one piston and a cylinder borehole,
- wherein the drive unit furthermore has a pressure medium to be applied to at least one pressure-active surface (F1, F2) of the piston, such that the valve closure is adjustable by means of the drive unit, from an open position (O), in which the valve closure and the valve seat are provided without contact in relation to one another, into a closed position (G), in which an axially sealing contact with respect to the opening axis (H) exists between the first sealing surface and the second sealing surface and the valve opening is thus closed gas-tight, and back again, wherein in the scope of the method a pressure of the pressure medium is measured.
1 more element
Dependencies are inferred from the claim text.