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US 11,378,073 B2Granted
Estimation device and valve control device
AssigneeShimadzu Corporation
InventorJunichiro Kozaki
Life of this patent
Estimating the term…
Abstract
An estimation device comprises: an oscillation section configured to superimpose an oscillation signal for oscillating a valve body of a vacuum valve provided between a vacuum pump configured to pump gas from a chamber and the chamber on an opening degree signal for driving the valve body; and an estimation section configured to estimate, based on a pressure response of a chamber internal pressure upon oscillation, a pumping characteristic regarding the gas pumped through the vacuum valve.
Claims6
An estimation device comprising:
- an oscillation section configured to superimpose an oscillation signal for oscillating a valve body of a vacuum valve provided between a vacuum pump configured to pump gas from a chamber and the chamber on an opening degree signal for driving the valve body;
- and
- an estimation section configured to estimate, based on a pressure response of a chamber internal pressure upon oscillation, a pumping characteristic regarding the gas pumped through the vacuum valve.
Dependencies are inferred from the claim text.