Nitride crystal substrate and method for manufacturing the same
AssigneesSciocs Company Limited, Sumitomo Chemical Company, Limited
InventorFumimasa Horikiri
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AssigneesSciocs Company Limited, Sumitomo Chemical Company, Limited
InventorFumimasa Horikiri
Estimating the term…
There is provided a nitride crystal substrate constituted by group-III nitride crystal, containing n-type impurities, with an absorption coefficient α being approximately expressed by equation (1) by a least squares method in a wavelength range of at least 1 μm or more and 3.3 μm or less. α=NeKλa (1) (where 1.5×10−19≤K≤6.0×10−19, a=3), here, a wavelength is λ (μm), an absorption coefficient of the nitride crystal substrate at 27° C. is α (cm−1), a carrier concentration in the nitride crystal substrate is Ne (cm−3), and K and a are constants, wherein an error of an actually measured absorption coefficient with respect to the absorption coefficient α obtained from equation (1) at a wavelength of 2 μm is within ±0.1α, and in a reflection spectrum measured by irradiating the nitride crystal substrate with infrared light, there is no peak with a peak top within a wavenumber range of 1,200 cm−1 or more and 1,500 cm−1 or less.
A nitride crystal substrate constituted by group-III nitride single crystal, containing n-type impurities, with an absorption coefficient α being approximated by equation (1) by a method of least squares in a wavelength range of at least 1 μm or more and 3.3 μm or less:
Dependencies are inferred from the claim text.