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US 11,377,736 B2Granted
Atomic layer deposition systems, methods, and devices
AssigneeSeagate Technology LLC
InventorsRiyan Alex Mendonsa, Martin Giles Blaber, Brett R. Herdendorf, Kevin A. Gomez
Life of this patent
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Abstract
A system includes a chamber, a support structure disposed in the chamber, and one or more heads. The support structure is configured to support and position a substrate. The one or more heads includes an energy source coupled to a near-field transducer for providing localized energy towards the support structure at select locations within the chamber.
Claims20
A system comprising:
- a chamber;
- a support structure disposed in the chamber and configured to support and position a substrate by rotation around a rotation axis;
- and
- heads each including a respective energy source coupled to a respective near-field transducer for providing localized energy towards the support structure at select locations within the chamber, wherein each head includes multiple gas inlet openings.
1 more element
A device comprising:
- a head comprising a body with gas inlet openings therethrough;
- lasers coupled to the body;
- near-field transducers coupled to the body, each near-field transducer is optically coupled one of the lasers;
- and
- waveguides coupled to the body, each waveguide is optically coupled between one of the lasers and one of the near-field transducers and not positioned within the gas inlet openings.
2 more elements
Dependencies are inferred from the claim text.