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US 11,377,725 B2Granted
Oxide sintered body and transparent conductive oxide film
AssigneeTosoh Corporation
InventorsRyo Akiike, Yuya Tsuchida, Hideto Kuramochi
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Abstract
An oxide sintered body containing indium, hafnium, tantalum, and oxygen as constituent elements, in which when indium, hafnium, and tantalum are designated as In, Hf, and Ta, respectively, the atomic ratio of Hf/(In+Hf+Ta) is equal to 0.002 to 0.030, and the atomic ratio of Ta/(In+Hf+Ta) is equal to 0.0002 to 0.013.
Claims6
A transparent conductive oxide film, comprising:
- an oxide including indium, hafnium, tantalum, and oxygen as constituent elements,
- wherein the oxide satisfies that an atomic ratio of Hf/(In+Hf+Ta) is equal to 0.002 to 0.030, and that an atomic ratio of Ta/(In+Hf+Ta) is equal to 0.0002 to 0.013, where In, Hf and Ta are indium, hafnium, and tantalum, respectively.
Dependencies are inferred from the claim text.