Magnetic levitation system, base of a magnetic levitation system, vacuum system, and method of contactlessly holding and moving a carrier in a vacuum chamber

A vacuum system, comprising:

• a transport vacuum chamber;
• a first vacuum processing chamber and a second vacuum processing chamber;
• and
• a magnetic levitation system for contactlessly holding and moving a carrier in the transport vacuum chamber from the first vacuum processing chamber to the second vacuum processing chamber along a transportation track, the magnetic levitation system comprising:
• a base defining the transportation track;
• the carrier movable above and relative to the base along the transportation track;
• at least one magnetic bearing for generating a magnetic levitation force (F) between the base and the carrier, the at least one magnetic bearing comprising a first magnet unit arranged at the base;
• and
• a magnetic side stabilization device for stabilizing the carrier in a lateral direction, the magnetic side stabilization device comprising a stabilization magnet unit arranged at the base, wherein at least one of the first magnet unit and the stabilization magnet unit is arranged in a housing space of the base which is separated from an inner volume of the transport vacuum chamber by a separation wall.

A method of contactlessly holding and moving a carrier in a vacuum chamber, comprising:

• providing a base defining a transportation track and a carrier movable above and relative to the base along the transportation track;
• generating a magnetic levitation force (F) between the base and the carrier with at least one magnetic bearing comprising a first magnet unit arranged at the base and a second magnet unit arranged at the carrier;
• and
• stabilizing the carrier in a lateral direction with a magnetic side stabilization device comprising a stabilization magnet unit arranged at the base, the carrier being arranged in an inner volume of the vacuum chamber provided at a first pressure (P1) and at least one of the first magnet unit and the stabilization magnet unit being arranged in a housing space of the base provided at a second pressure (P2) different from the first pressure (P1).