Corrosion-resistant components and methods of making
AssigneeCoorsTek, Inc.
InventorsMatthew Simpson, Ramesh Divakar, Alan Filer
Life of this patent
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Abstract
A corrosion-resistant component configured for use with a semiconductor processing reactor, the corrosion-resistant component comprising: a) a ceramic insulating substrate; and, b) a white corrosion-resistant non-porous outer layer associated with the ceramic insulating substrate, the white corrosion-resistant non-porous outer layer having a thickness of at least 50 μm, a porosity of at most 1%, and a composition comprising at least 15% by weight of a rare earth compound based on total weight of the corrosion-resistant non-porous layer; and, c) an L* value of at least 90 as measured on a planar surface of the white corrosion-resistant non-porous outer layer. Methods of making are also disclosed.
Claims36
A component configured for use with a semiconductor processing reactor, the component comprising:
- a) a ceramic insulating substrate;
- b) a white outer layer adhered to the ceramic insulating substrate, the white outer layer having a thickness of at least 50 um, a porosity of at most 1%, an average grain size of at most 100 um and at least 500 nm, and a composition comprising at least 25% by weight of a rare earth compound based on the total weight of the white outer layer;
- c) a loss tangent of at most 1×10−4;
- and,
- d) an L* value of at least 90 as measured on a surface of the white outer layer.
A component comprising:
- a) a ceramic insulating substrate comprising a material selected from the group consisting of an alumina, an aluminum nitride, a silicon nitride, a silicate-based material, and mixtures thereof;
- b) a white outer layer adhered to the ceramic insulating substrate, the white outer layer having a thickness of at least 50 μm, a porosity of at most 1%, an average grain size of at most 100 μm and at least 500 nm, and a composition comprising at least 15% by weight of a rare earth compound based on the total weight of the white outer layer and selected from the group consisting of yttrium oxide (Y2O3), yttrium silicates, yttrium fluorides, yttrium oxyfluorides, yttrium aluminates, yttrium nitrides, and combinations of two or more thereof,
- c) a carbon content of less than 200 ppm and a loss tangent at most 1×104;
- and
- d) an L* value of at least 90 as measured on a surface of the white outer layer.
Dependencies are inferred from the claim text.