Imprint master template and method of manufacturing the same
AssigneeSamsung Display Co., Ltd.
InventorsKang Soo Han, Moonjung An, Gugrae Jo, Hyungbin Cho
Life of this patent
Estimating the term…
Loading patent…
AssigneeSamsung Display Co., Ltd.
InventorsKang Soo Han, Moonjung An, Gugrae Jo, Hyungbin Cho
Estimating the term…
An imprint master template including a first fine pattern unit having an upper surface on which a fine pattern is formed, a second fine pattern unit disposed adjacent to the first fine pattern unit and having an upper surface on which a fine pattern is formed, and a supporting part configured to support the first fine pattern unit and the second fine pattern unit. A side surface of the first fine pattern unit faces a side surface of the second fine pattern unit. The side surface of the first fine pattern unit includes a first surface which is perpendicular to the upper surface and a second surface which is inclined at a predetermined angle with respect to the first surface. The side surface of the second fine pattern unit includes a first surface which is perpendicular to the upper surface and a second surface which is inclined at a predetermined angle with respect to the first surface.
An imprint master template, comprising:
Dependencies are inferred from the claim text.