Pattern forming method
AssigneeCanon Kabushiki Kaisha
InventorsTomonori Otani, Toshiki Ito
Life of this patent
Estimating the term…
Abstract
Pattern forming method includes, for each shot area group (SAG) in the following order: discretely dropping curable composition droplets to layer the droplets on a plurality of shot areas included in a certain SAG on substrate; waiting for a time of (mmax−m)×Td, where Td is a time for the dropping on one shot area, m is the number of shot areas included in the certain SAG, and mmax is the maximum value of m; and imprinting in order that the dropping is performed on the plurality of shot areas. The time Td and a time Ti for the imprinting on one shot area are equal to each other. The number of shot areas included in at least one SAG is different from the number of shot areas included in another at least one SAG. In the waiting, the dropping and the imprinting are not performed.
Claims24
A method of forming a pattern in a plurality of shot areas included in a plurality of shot area groups on a substrate, the method comprising, for each shot area group of the plurality of shot area groups, in the following order:
- discretely dropping droplets of a curable composition (A1) containing at least a component (a1) serving as a polymerizable compound to layer the droplets on a plurality of shot areas included in a certain shot area group of the plurality of shot area groups on the substrate;
- waiting for a time of (mmax−m)×Td, where Td is a time for the dropping on one shot area, m is the number of shot areas included in the certain shot area group, and mmax is the maximum value of the number of shot areas included in a shot area group among the plurality of shot area groups;
- and
- in an order in which the dropping is performed on the plurality of shot areas included in the certain shot area group, imprinting which includes:
- bringing the curable composition (A1) into contact with a mold;
- irradiating the curable composition (A1) with light from a side of the mold to cure the curable composition (A1);
- and
- separating the mold from the cured product of the curable composition (A1);
- wherein the time Td and a time Ti for the imprinting on one shot area are equal to each other,
- each shot area group of the plurality of shot area groups does not include shot areas included in another shot area group of the plurality of shot area groups,
- the number of shot areas included in at least one shot area group is different from the number of shot areas included in another at least one shot area group, and
- in the waiting step, the dropping and the imprinting are not performed.
A method of forming a pattern in a plurality of shot areas included in r shot area groups on a substrate where r is 2 or more, each shot area group of the r shot area groups does not include shot areas included in another shot area group of the r shot area groups, the method comprising, in the following order:
- discretely dropping droplets of a curable composition (A1) containing at least a component (a1) serving as a polymerizable compound to layer the droplets on a first plurality of shot areas included in a first shot area group of the r shot area groups on the substrate;
- waiting for a time of (mmax−m1)×Td, where Td is a time for the dropping on one shot area, m1 is the number of shot areas included in the first shot area group, and mmax is the maximum value of the number of shot areas included in a shot area group among the r shot area groups;
- and
- waiting for a time of mmax×Ti, where Ti is a time for imprinting on one shot area, the imprinting including:
- bringing the curable composition (A1) into contact with a mold;
- irradiating the curable composition (A1) with light from a side of the mold to cure the curable composition (A1);
- and
- separating the mold from the cured product of the curable composition (A1);
- the method further comprising, in the following order with k from 2 to r in order:
- discretely dropping droplets of the curable composition (A1) containing at least the component (a1) serving as the polymerizable compound to layer the droplets on a k-th plurality of shot areas included in a k-th shot area group on the substrate;
- waiting for a time of (mmax−mk)×Td, where mk is the number of shot areas included in the k-th shot area group;
- imprinting, in an order in which the dropping is performed on a (k−1)-th plurality of shot areas included in a (k−1)-th shot area group, the (k−1)-th plurality of shot areas included in the (k−1)-th shot area group;
- and
- waiting for a time of (mmax−mk−1)×Ti;
- the method further comprising, in the following order:
- waiting for a time of mmax×Td;
- and
- imprinting, in an order in which the dropping is performed on an r-th plurality of shot areas included in an r-th shot area group, the r-th plurality of shot areas included in the r-th shot area group;
- wherein the time Td and the time Ti are equal to each other, and
- in the waiting steps, dropping and imprinting are not performed.
Dependencies are inferred from the claim text.