Polishing apparatus

A polishing method using a polishing apparatus that includes a polisher configured to polish a surface of a target object to be polished;

• a holder configured to be rotatable while holding the target object to be polished;
• a plurality of elastic members provided on the holder concentrically around a center of a rotation shaft of the holder;
• and a plurality of vibration sensors provided in the plurality of elastic members, the polishing method comprising:
• rotating the target object to be polished while elastically pressing the target object to be polished against the polisher;
• detecting, using the plurality of vibration sensors, a vibration from the surface of the target object to be polished;
• determining, using a calculator, an unevenness of the polishing surface of the target object to be polished based on the vibration detected by the plurality of vibration sensors;
• and
• controlling, using a controller, pressure inside one or more of the plurality of elastic members based on the unevenness of the polishing surface of the target object to be polished.

A polishing system for polishing a target surface, the polishing system comprising:

• a polisher comprising:
• one or more pressure actuated members movable to contact with the target surface;
• and
• one or more vibration sensors, at least one of the one or more vibration sensors disposed in one of the one or more pressure actuated members;
• a computer connected to the one or more vibration sensors;
• a calculator connected to the computer and configured to determine a vibration signal obtained by the computer;
• and
• a controller configured to receive the vibration signal from the calculator and to control a driver to actuate the polisher such that the one or more pressure actuated members move against the target surface, and the at least one of the one or more vibration sensors are movable relative to the one of the one or more pressure actuated members;
• and
• a first magnetic rail and a second magnetic rail structured to keep the at least one vibration sensor in place with respect to the target surface during polishing.