Substrate holder and method of manufacturing a substrate holder
AssigneeASML Netherlands B.V.
InventorsRaymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg
Life of this patent
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Abstract
An object holder for a lithographic apparatus has a main body having a surface. A plurality of burls to support an object is formed on the surface or in apertures of a thin-film stack. At least one of the burls is formed by laser-sintering. At least one of the burls formed by laser-sintering may be a repair of a damaged burl previously formed by laser-sintering or another method.
Claims20
A substrate holder for use in a lithographic apparatus, the substrate holder comprising:
- a main body having a first surface and a second surface opposite the first surface;
- a plurality of first burls at the first surface and having end surfaces to support a substrate in the lithographic apparatus;
- a plurality of second burls at the second surface to support the substrate holder on a structure;
- and
- an electric or electrical component on an external surface of the body that is other than the first surface,
- wherein the plurality of first burls each comprise a lower body portion protruding from the first surface and an upper body portion above the lower body portion, the lower body portions comprise a different material from the upper body portions, and the upper body portions comprise diamond-like carbon or diamond.
A substrate holder for use in a lithographic apparatus, the substrate holder comprising:
- a main body having a first surface and a second surface opposite the first surface;
- a plurality of first burls at the first surface and having end surfaces to support a substrate in the lithographic apparatus;
- and
- a plurality of second burls at the second surface to support the substrate holder on a structure;
- an electric or electrical component on an external surface of the body that is other than the first surface,
- wherein each of the first burls comprise a lower body portion protruding from the first surface and an upper body portion above the lower body portion, the lower body portions comprising a different material from the upper body portions, and the plurality of first burls and/or the plurality of second burls have a cross-sectional width selected from the range of 200 μm to 500 μm.
Dependencies are inferred from the claim text.