Methods and systems for polymer deposition

A method, comprising:

• depositing a coating comprising poly(tetrafluoroethylene) on a substrate, wherein:
• the substrate is positioned in a reaction volume;
• the reaction volume is positioned in a deposition chamber;
• the reaction volume comprises at most 10 mTorr of air and comprises hexafluoropropylene oxide vapor;
• the reaction volume comprises a filament taking the form of a resistively heated wire;
• the wire heats the hexafluoropropylene oxide vapor, thereby causing it to decompose;
• the substrate outgasses one or more gases during the deposition of the coating;
• and
• the one or more gases make up greater than or equal to 0.1 mol % and less than or equal to 10 mol % of the gases present in the reaction volume during the deposition of the coating.